A state-owned enterprise has begun mass production of self-developed DUV lithography manufacturing equipment, with ChangXin Memory Technologies potentially among its first customers

Odaily reported, citing sources familiar with the matter, that a company backed by Chinese state capital has commenced mass production of domestically developed DUV (Deep Ultraviolet) lithography manufacturing equipment. This marks a significant step forward for China's semiconductor industry in advancing import substitution.

According to reports, the company plans to produce approximately 5 DUV lithography machines in 2026 and expand output to around 20 units in 2027. While there remains a gap compared to the production capacity of Dutch lithography giant ASML (which delivered 131 immersion DUV lithography systems last year), the breakthrough in mass-producing domestic DUV equipment signals further progress towards self-sufficiency and independent control of China's chip manufacturing supply chain.

Sources stated that this batch of domestically produced DUV lithography machines is scheduled for delivery to major Chinese chip manufacturers, including Semiconductor Manufacturing International Corporation (SMIC), Hua Hong Semiconductor, and memory chip producer ChangXin Memory Technologies.

Among these, ChangXin Memory Technologies, as a representative enterprise in China's DRAM industry, is expected to become a key adopter of advanced domestically produced semiconductor manufacturing equipment. If the domestic DUV equipment can achieve stable operation on the production lines of manufacturers like ChangXin, it will further reduce China's memory chip industry's reliance on critical overseas equipment.