一国有资企业已开始量产自主研发的DUV光刻机制造设备，长鑫存储或成为首批客户之一
Odaily Planet Daily News: According to The Information, citing sources familiar with the matter, a company backed by Chinese state capital has begun mass-producing domestically developed DUV (deep ultraviolet) lithography manufacturing equipment. This marks significant progress in promoting localized alternatives within China's semiconductor industry.
It is reported that the company plans to produce approximately 5 DUV lithography machines in 2026, expanding to around 20 units by 2027. Although there is still a gap compared with Dutch lithography giant ASML (which delivered 131 immersion DUV lithography systems last year), the breakthrough in mass production of domestic DUV equipment indicates that China's chip manufacturing supply chain is moving further towards self-sufficiency and independent control.
Sources stated that these domestically produced DUV lithography machines are scheduled to be delivered to major Chinese chip manufacturers, including SMIC, Hua Hong Semiconductor, and memory chip maker Changxin Memory Technologies (CXMT).
Among them, CXMT, as a representative company of China's DRAM industry, is expected to become an important adopter of advanced domestically produced semiconductor manufacturing equipment. If the domestic DUV equipment can achieve stable operation in the production lines of CXMT and other manufacturers, it will further reduce China's memory chip industry's reliance on critical overseas equipment.
